Abstract

In this work, we demonstrate the excitation of surface acoustic waves (SAW) harmonics up to GHz regime in photolitographed devices fabricated on gallium arsenide (GaAs) by acting on the IDT metallization ratio among the finger width and pitch. Specifically, we observed up to the 13th harmonic, which corresponds to a frequency of about 1.7 GHz. Moreover, we employed time-resolved spectroscopy for isolating the shape of the SAW bandpass-filter response (for each harmonic) eliminating the interference between acoustic and electromagnetic waves. Notably, the extracted SAW spectra are characterized by a bandwidth which remains constant for the different harmonic modes, unlike the case of traditional SAW filters (having a 0.5 metallization ratio) where the pass band Delta f = f(0)/n(p) np increases with the working frequency. These results are relevant for applications where high frequencies and multiple harmonics excitation are desirable, or where quantitative measurements of the direct SAW signal are required.

Autore Pugliese

• Maruccio Giuseppe

Tutti gli autori

• Rizzato S. , Scigliuzzo M. , Chiriaco M.S. , Scarlino P. , Monteduro A.G. , Maruccio C. , Tasco V. , Maruccio G.

Titolo volume/Rivista

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Anno di pubblicazione

2017

ISSN

0960-1317

ISBN

Non Disponibile

Numero di citazioni Wos

Nessuna citazione

Ultimo Aggiornamento Citazioni

Non Disponibile

Numero di citazioni Scopus

Non Disponibile

0

Ultimo Aggiornamento Citazioni

23/04/2018

Settori ERC

Non Disponibile

Codici ASJC

Non Disponibile