Abstract

he improvement of the adhesion of a coating film to the coated material and of its wear resistance is a fundamental aspect for protective hard coatings. As a consequence, the optimization of the deposition techniques is required to properly tune the film properties.Among the numerous materials for hard coatings, zirconium nitride (ZrN) is extensively studied for use in tribological applications, thanks to its high hardness, strong wear resistance, chemical stability and high corrosion resistance. In this work ZrN films were RF-sputtered on silicon and tungsten carbide substrates, with different assistance bias voltages applied to the substrate during the film deposition. Their adhesion and wear resistance properties were evaluated and correlated to the structural and compositional properties, showing the best responses (higher critical load and scratch hardness, and lower wear rate) when using a low negative bias voltage (− 5 V).

Autore Pugliese

• Galietti Umberto

Tutti gli autori

• D. Valerini , M.A. Signore , L. Tapfer , E. Piscopiello , Galietti U , A. Rizzo

Titolo volume/Rivista

THIN SOLID FILMS

Anno di pubblicazione

2013

ISSN

0040-6090

ISBN

Non Disponibile

Numero di citazioni Wos

Nessuna citazione

Ultimo Aggiornamento Citazioni

Non Disponibile

Numero di citazioni Scopus

4

Ultimo Aggiornamento Citazioni

2017-04-23 03:20:56

Settori ERC

Non Disponibile

Codici ASJC

Non Disponibile