Abstract

In this work we present for the first time the fabrication and the characterization of flexible micro cantilevers based on Aluminum Nitride (AlN) as piezoelectric active layer and polyimide as elastic substrate. The AlN thin film, embedded into two layers of Molybdenum (Mo), is grown by sputtering deposition and presents highly c-axis oriented hexagonal crystal structure. The flexible structures are successfully realized by a two masks process, exploiting a silicon support to perform device key fabrication steps together with optimized processes for peeling off and patterning of the flexible layer. The realized flexible cantilevers present a bending downwards because of the residual compressive stress of the Mo/AlN/Mo multilayer on polyimide. The mechanical response of the realized flexible cantilevers has been investigated by piezoresponse measurements and the experimentally obtained first resonance frequency resulted to be around 15 kHz. This value has been compared with simulations of the structures performed by finite element method.

Autore Pugliese

• Maruccio Giuseppe , De Vittorio Massimo

Tutti gli autori

• S. Petroni , G. Maruccio , F. Guido , M. Amato , A. Campa , A. Passaseo , M. Todaro , M. De Vittorio

Titolo volume/Rivista

MICROELECTRONIC ENGINEERING

Anno di pubblicazione

2012

ISSN

0167-9317

ISBN

Non Disponibile

Numero di citazioni Wos

7

Ultimo Aggiornamento Citazioni

23/04/2018

Numero di citazioni Scopus

10

Ultimo Aggiornamento Citazioni

24/04/2018

Settori ERC

Non Disponibile

Codici ASJC

Non Disponibile