Abstract

The development of new microfabrication techniques is attracting more and more interest because of the increasing demand for three-dimensional tools with features of biocompatibility, flexibility and low-costs in the lab-on-chip field. Photolithographic techniques involving the molding of organic polymers, like SU-8, allow for short fabrication times and simplicity in devices prototyping. In this paper we used LOR and SU-8 resists in combination within an innovative lithographic approach. LOR resist was employed not as a typical sacrificial layer for the production of free-standing structures but as a three-dimensional solid resist, which can be patterned and embedded in a SU-8 monolith. After dissolution it can form cavities to provide a final multilevel structure. A detailed description of the optimization process required to obtain the final structure and to overcome issues related to the employ of LOR is reported. In the end, a network of working interconnected multilevel microchannels, useful for biological applications, has been realized through a new, cheap and time-saving method.

Autore Pugliese

• Maruccio Giuseppe

Tutti gli autori

• Chiriacò M.S. , Bianco M. , Amato F. , Primiceri E. , Ferrara F. , Arima V. , Maruccio G.

Titolo volume/Rivista

MICROELECTRONIC ENGINEERING

Anno di pubblicazione

2016

ISSN

0167-9317

ISBN

Non Disponibile

Numero di citazioni Wos

2

Ultimo Aggiornamento Citazioni

28/04/2018

Numero di citazioni Scopus

2

Ultimo Aggiornamento Citazioni

28/04/2018

Settori ERC

Non Disponibile

Codici ASJC

Non Disponibile