Abstract

Ta2O5 thin films were prepared by spin-coating methanol solutions of Ta chloromethoxide. It was prepared by reacting TaCl5 with methanol, followed by water addition (H2O: Ta molar ratio was 16). Thin films were deposited by spin-coating onto SiO2/Si substrates, followed by drying at 90 degrees C and heat-treatment up to 700 degrees C. The films were characterized by X-ray diffraction, transmission electron microscopy and field emission scanning electron microscopy. Crystallization was obtained only after heating at 700 degrees C, in the Ta2O5 orthorhombic phase. The resulting films had a thickness of 100 nm. Their structure was constituted by porous crystals with size up to 50 nm, while the pores had a size of about 10 nm. The results demonstrated that TaCl5 is very convenient precursor for the wet chemical synthesis of Ta2O5 thin films. (C) 2013 Elsevier B.V. All rights reserved.

Autore Pugliese

• Epifani Mauro Salvatore , Siciliano Pietro Aleardo

Tutti gli autori

• Epifani M.; Zamani R.; Arbiol J.; Fabrega C.; Andreu T.; Pace G.B.; Siciliano P.; Morante J.R.

Titolo volume/Rivista

Thin solid films

Anno di pubblicazione

2014

ISSN

0040-6090

ISBN

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Numero di citazioni Wos

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Settori ERC

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Codici ASJC

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