Abstract

The out-of-plane deformation and the pull-in voltage of electrostatically actuated cantilevers with a residual stress gradient,is investigated in the length range 100-300 um. Measured pull-in voltages are compared with calculations, which areobtained using previously proposed analytical expressions and a finite element method (FEM) modelling. In particular, asimplified model of the residual stress distribution inside cantilevers is formulated that enables FEM simulation ofmeasured out-of-plane deformations and pull-in voltages for all lengths of fabricated cantilevers. The presented experimentalresults and FEM model are exploitable in the design of cantilever-based microelectromechanical systems, in orderto provide a reliable prediction of the influence of residual stress gradient on device shape and pull-in voltage.

Autore Pugliese

• Persano Anna

Tutti gli autori

• A. Persano; J. Iannacci; P. Siciliano; F. Quaranta

Titolo volume/Rivista

Microsystem technologies

Anno di pubblicazione

2018

ISSN

0946-7076

ISBN

Non Disponibile

Numero di citazioni Wos

Nessuna citazione

Ultimo Aggiornamento Citazioni

Non Disponibile

Numero di citazioni Scopus

Non Disponibile

Ultimo Aggiornamento Citazioni

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Settori ERC

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Codici ASJC

Non Disponibile