Optical properties of silicon semiconductor-supported gold nanoparticles obtained by sputtering
Abstract
Gold nanoclusters are deposited directly on silicon by sputtering of a target of metallic gold usingan argon plasma to provide a semiconductor-based plasmonic platform. The effects of annealingand substrate temperatures during the nanoparticles deposition and of the silicon surface energy onthe shape of the nanoparticles and resulting surface plasmon resonance are investigated. The Aunanoparticles are characterized optically, structurally and morphologically using spectroscopic ellipsometry,transmission electron microscopy and atomic force microscopy to establish a correlationamong the Au/Si interface reactivity, the Au nanoparticles shape and plasmonic resonance properties.It is found that post-growth annealing up to 600 C of nanoparticles deposited at 60 C causesaggregation of nanoparticles. Increasing the temperature of the substrate during the sputtering ofgold on Si yields pancake-like nanoparticles with a large Si/Au interface reactivity forming a goldsilicidesinterface layer. The O2 plasma treatment of the Si surface forming a thin intentional SiO2interface layer prevents the Au/Si interdiffusion yielding polyedrical nanoparticles whose plasmonresonance can be shifted down to 1.5 eV
Autore Pugliese
Tutti gli autori
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M.M. Giangregorio; G.V. Bianco; P. Capezzuto; G. Bruno; M. Losurdo; A.A. Suvorova; M. Saunders
Titolo volume/Rivista
Journal of nanoscience and nanotechnology
Anno di pubblicazione
2012
ISSN
1533-4880
ISBN
Non Disponibile
Numero di citazioni Wos
Nessuna citazione
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Settori ERC
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Codici ASJC
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