Abstract

The electrostatic actuation behaviour of the gold bridge in capacitive radio frequency microelectromechanical system switches, fabricated on GaAs substrate, is investigated. An unconventional imaging technique, based on the out-of-focus reflection, was used to evaluate the topographic profile of the suspended bridge and its lowering as a function of the voltage. Important parameters for the switch actuation, such as the pull-down voltage and the air gap between the bridge and the actuator, are estimated. Capacitance-voltage curves allow to evaluate the capacitance associated to the bridge in the up and down states as well as the dielectric constant of the Si<inf>3</inf>N<inf>4</inf> layer, which covers the actuator. The experimental values of the pull-down voltage and the dielectric constant are used to extract from the theoretical equations the residual stress of the fabricated gold membrane. Finally, the current through the dielectric Si<inf>3</inf>N<inf>4</inf> layer was measured as a function of the voltage applied to the actuator, finding that the Poole-Frenkel effect is the dominant conduction mechanism when the switch is actuated.

Autore Pugliese

• Persano Anna , Quaranta Fabio , Siciliano Pietro Aleardo

Tutti gli autori

• Persano A.; Quaranta F.; Martucci M.C.; Siciliano P.; Cola A.

Titolo volume/Rivista

Sensors and actuators. A, Physical

Anno di pubblicazione

2015

ISSN

0924-4247

ISBN

Non Disponibile

Numero di citazioni Wos

Nessuna citazione

Ultimo Aggiornamento Citazioni

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Numero di citazioni Scopus

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Ultimo Aggiornamento Citazioni

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Settori ERC

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Codici ASJC

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