Abstract

In this paper we present the design and fabrication of a fully flexible sensorial system, composed ofthree different sensor units implemented on an ultrathin polyimide substrate of 8 ¼m thick. Eachunit is composed by a capacitive chemical sensor integrated with readout electronics. The sensorsare parallel plate capacitors with the top electrode properly patterned to allow analytes diffusioninto the dielectric that acts as chemical interactive material. Three different polymers,poly(tetrafluoroethene) (PTFE), poly(methyl 2-methylpropenoate) (PMMA) and benzocyclobutene(BCB), were used as dielectrics. A ring oscillator circuit, implemented with polysilicon thin filmtransistors (PS-nTFT), was used to convert the capacitance variations into frequency shifts. Theelectronic tests show oscillating frequencies of about 211 kHz ± 2 kHz and negligible frequencyshifts under different bending radius conditions. Furthermore, system response to some alcoholsconcentrations (Methanol, Ethanol, 1-Butanol, 1-Propanol) is reported and data analysis proves thatthe system is able to discriminate methanol from ethanol.

Autore Pugliese

• Cuscuna' Massimo

Tutti gli autori

• Zampetti E; Maiolo L; Pecora A; Maita F; Pantalei S; Minotti A; Valletta A; Cuscunà M; Macagnano A; Fortunato G; Bearzotti A

Titolo volume/Rivista

Sensors and actuators. B, Chemical

Anno di pubblicazione

2011

ISSN

0925-4005

ISBN

Non Disponibile

Numero di citazioni Wos

Nessuna citazione

Ultimo Aggiornamento Citazioni

Non Disponibile

Numero di citazioni Scopus

Non Disponibile

Ultimo Aggiornamento Citazioni

Non Disponibile

Settori ERC

Non Disponibile

Codici ASJC

Non Disponibile