Fabrication Of Micro-Nozzles Via u-EDM Process
Abstract
Since traditional handling mechanisms have an unpredictable behavior at micro scale, micro-assembly is a bottleneck in the development of hybrid micro-systems, and the development of new approaches is strongly demanded. In this paper, a recent study of the fabrication of a ceramics vacuum micro-gripper to handle parts in the range of hundreds of microns (300-1000) is presented. Among the possible micro manufacturing processes, micro-EDM has been selected as proving to be a very competitive fabrication technology for the manufacturing of ultra miniature components and micro sized features. The influence of the process parameters on the machining performance of interest is firstly investigated; then, the experimental results on machining the micro gripper are presented, finally concluding remarks are given.
Autore Pugliese
Tutti gli autori
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Modica F.; Ferraris E.; Trotta G.; Fassi I.; Reynaerts D.
Titolo volume/Rivista
AIP conference proceedings
Anno di pubblicazione
2010
ISSN
0094-243X
ISBN
978-0-7354-0871-5
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Nessuna citazione
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