Abstract

The influence of N2, O2, air, and water vapor feed gas impurities on the operation of an atmospheric pressure parallel plate DBD fed with helium and argon was investigated. The addition of increasing amounts of these impurities, under fixed excitation frequency and applied voltage, is responsible above certain thresholds of two distinct phenomena, namely the transition from a homogeneous to a filamentary appearance of the discharge and the contraction of the discharge volume. Among the different contaminants N2 shows the highestthreshold limit values, O2 and H2O the lowest ones, while air generally exhibits an intermediate behavior. The effect of feed gas impurities was also studied on the PE-CVD of fluoropolymers from Ar-C3F6 fed filamentary DBDs. Contaminants addition results in a decrease of the input power and of the deposition rate as well as in a change of the film morphology, however it does not influence significantly the chemical composition of thefluoropolymer film, the monomer depletion and the distribution of by-products in the exhaust gas.

Autore Pugliese

• Fanelli Fiorenza

Tutti gli autori

• F. Fanelli; R. d'Agostino; F. Fracassi

Titolo volume/Rivista

Plasma processes and polymers

Anno di pubblicazione

2011

ISSN

1612-8850

ISBN

Non Disponibile

Numero di citazioni Wos

Nessuna citazione

Ultimo Aggiornamento Citazioni

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Numero di citazioni Scopus

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Ultimo Aggiornamento Citazioni

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Settori ERC

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Codici ASJC

Non Disponibile