Abstract

In this work we report the design and development of a biomimetic waterproof Si/SiN multilayered cantilever whose internal stress gradient bends the beam out of the plane enabling flow velocity detection in water. A water resistant parylene conformal coating has been deposited on the artificial hair cell for waterproof operation. The sensing mechanism is represented by a piezoresistive strain-gauge along the cantilever beam. A set-up for analysing sensor responsivity in air and water has been used and its electrical behavior is reported. Responsivity of 0.7 mV/(cm/s) is recorded and a linear response of sensor read-out signal amplitude with respect to flow pulses up to 30 Hz. Parylene conformal coating is demonstrated to be an efficient method for water sealing and can be effective in the post-fabrication for tuning the micromechanical cantilever properties.

Autore Pugliese

• De Vittorio Massimo

Tutti gli autori

• A. Qualtieri , F. Rizzi , G. Epifani , A. Ernits , M Kruusmaa , M. De Vittorio

Titolo volume/Rivista

MICROELECTRONIC ENGINEERING

Anno di pubblicazione

2012

ISSN

0167-9317

ISBN

Non Disponibile

Numero di citazioni Wos

22

Ultimo Aggiornamento Citazioni

28/04/2018

Numero di citazioni Scopus

23

Ultimo Aggiornamento Citazioni

28/04/2018

Settori ERC

Non Disponibile

Codici ASJC

Non Disponibile