Surface acoustic wave pressure sensor

Torna indietro

Abstract

Surface acoustic wave pressure sensor (1) comprising: - a substrate (3) and at least one flexible membrane (5), suspended over a cavity (4) defined in the thickness of the substrate, the membrane (5) being elastically deformable by a pressure (P) applied by a fluid (5) and being defined between a first surface (5a) facing the cavity (4) and a second opposite surface (5b); - a SAW device (6, 7 8) comprising a layer of piezoelectric material (6) arranged on said second surface (5b) of the membrane, the SAW device further comprising at least one SAW electro-acoustic transducer (7, 8) formed on one free surface of said piezoelectric layer (6). The piezoelectric layer (6) is formed by deposition of piezoelectric material on the membrane (5) and the substrate (3) is integrated in a wafer of semiconductor material (2), the membrane being a layer of said wafer (2) suspended over said cavity (4).

Classe Tecnologica

G - Physics

Patent Office

United States Patent and Trademark Office

Numero Deposito

US7343805

Anno Deposito

2006

Anno Concessione

2007

Inventori Pugliesi

  • Petroni Simona

Tutti gli inventori

  • Chantal Combi
  • Simona Petroni
  • Anna Angela Pomarico
  • Lorenzo Baldo

Titolari pugliesi

  • Non ci sono titolari pugliesi

Tutti i titolari

  • STMicroeletronics S.r.l.