MICROELECTROMECHANICAL THREE-AXIS CAPACITIVE ACCELEROMETER

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Abstract

A micromechanical structure for a MEMS three-axis capacitive accelerometer is provided with: a substrate; a single inertial mass having a main extension in a plane and arranged suspended above the substrate; and a frame element, elastically coupled to the inertial mass by coupling elastic elements and to anchorages, which are fixed with respect to the substrate by anchorage elastic elements. The coupling elastic elements and the anchorage elastic elements are configured so as to enable a first inertial movement of the inertial mass in response to a first external acceleration acting in a direction lying in the plane and also a second inertial movement of the inertial mass in response to a second external acceleration acting in a direction transverse to the plane.

Classe Tecnologica

G - Physics

Patent Office

United States Patent and Trademark Office

Numero Deposito

US2012000287

Anno Deposito

2010

Anno Concessione

2012

Inventori Pugliesi

  • De Masi Biagio

Tutti gli inventori

  • Attilio Frangi
  • Biagio De Masi
  • Barbara Simoni

Titolari pugliesi

  • Non ci sono titolari pugliesi

Tutti i titolari

  • STMicroeletronics S.r.l.