Microelectromechanical resonant structure having improved electrical characteristics

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Abstract

The present disclosure is directed to a MEMS resonant structure, provided with a substrate of semiconductor material; a mobile mass suspended above the substrate and anchored to the substrate by constraint elements to be free to oscillate at a resonance frequency; and a fixed-electrode structure capacitively coupled to the mobile mass to form a capacitor with a capacitance that varies as a function of the oscillation of the mobile mass; the fixed-electrode structure arranged on a top surface of the substrate, and the constraint elements being configured in such a way that the mobile mass oscillates, in use, in a vertical direction, transverse to the top surface of the substrate, keeping substantially parallel to the top surface.

Classe Tecnologica

H - Electricity

Patent Office

United States Patent and Trademark Office

Numero Deposito

US8289092

Anno Deposito

2010

Anno Concessione

2012

Inventori Pugliesi

  • Morea Annarita
  • Roselli Giuditta

Tutti gli inventori

  • Anna Pomarico
  • Pasquale Flora
  • Annarita Morea
  • Giuditta Roselli

Titolari pugliesi

  • Non ci sono titolari pugliesi

Tutti i titolari

  • STMicroeletronics S.r.l.